BSIEC62047-49:2025 BSl Standards Publication Semiconductor devices Micro- electromechanical devices Part 49: Temperature and humidity test methods forpiezoelectricMEMScantilevers bsi. BSIEC62047-49:2025 BRITISH STANDARD National foreword ThisBritish Standard is theUK implementationof IEC 62047-49:2025 The UK participation in its preparation was entrusted to Technical CommitteeEPL/47,Semiconductors. A list of organizations represented on this committee can be obtained on requestto its committee manager. Contractualandlegalconsiderations This publication has been prepared in good faith, however no representation,warranty,assurance or undertaking (express or implied) is or will bemade,and no responsibility or liability is or will be reasonableness of this publication. All and any such responsibility and liability isexpresslydisclaimedtothefull extentpermitted bythelaw. This publication is provided as is, and is to be used at the recipient's own risk. The recipient is advised to consider seeking professional guidance with respect to its use of this publication. Thispublication is not intendedto constitutea contract.Users are responsibleforitscorrectapplication. TheBritishStandards Institution2025 Published byBSI Standards Limited 2025 ISBN9780539303728 ICS31.080; 31.080.99 Compliance with a British Standard cannot confer immunity from legal obligations. This British Standard was published under the authority of the StandardsPolicyandStrategyCommitteeon30November2025. Amendments/corrigenda issued sincepublication Date Text affected BSIEC62047-49:2025 IEC IEC 62047-49 Edition 1.02025-11 INTERNATIONAL STANDARD Semiconductordevices-Micro-electromechanicaldevices Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers IEC 62047-49:2025-11(en) ICS 31.080.99 ISBN 978-2-8327-0858-3 BSIEC62047-49:2025 THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright@2025IEC,Geneva,Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanicai, including photocopying and microfilm, without permission in writing from either IEc or IEC's member National Committee in the country of the requester. If you have any questions about IEC copyright IEC member National Committee for further information. IECSecretariat Tel.: +41 22 919 02 11 3, rue de Varembe [email protected] CH-1211Geneva 20 www.iec.ch Switzerland About the IEC International Standards for all electrical, electronic and related technologies. AboutIECpublications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the IECpublicationssearch IEc Products &Services Portal-products.iec.ch webstore.iec.ch/advsearchform Discover our powerful search engine and read freely all the The advanced search enables to find IEC publications by a publications previews, graphical symbols and the glossary variety of criteria (reference number, text, technical With a subscription you wili always have access to up to date committee, ...). It also gives information on projects, content tailored to your needs. replaced and withdrawn publications. Electropedia -www.electropedia.org IEc JustPublished-webstore.iec.ch/justpublished The world's leading online dictionary on electrotechnology, Stay up to date on all new IEC publications. Just Published containing more than 22 500 terminological entries in English details all new publications released. Available online and and French, with equivalent terms in 25 additional languages. once a month by email. Also known as the International Electrotechnical Vocabulary (IEV) online. IECCustomerServiceCentre-webstore.iec.ch/csc If you wish to give us your feedback on this publication or need further assistance, please contact the Customer Service Centre:[email protected]. Warning! Make sure that you obtained this publication from an authorized distributor. BSIEC62047-49:2025 IEC62047-49:2025IEC2025 CO